Cluster source literature:
Invention of the gas aggregation magnetron sputtering cluster source:
Filling of micron‐sized contact holes with copper by energetic cluster impact
Image: Mantis Deposition, Ltd
The cluster source is combined with a thin film sputter system to fabricate nanoparticle thin film composites in contineous vacuum:
Metals, semiconductors and insulators can be used for the nanoparticles and thin films.