Marcel Di Vece PhD.

Cluster Source

Cluster source literature:

Invention of the gas aggregation magnetron sputtering cluster source:
Filling of micron‐sized contact holes with copper by energetic cluster impact

Cluster source overviews:
The physics of simple metal clusters: experimental aspects and simple models
Cluster beam deposition: a tool for nanoscale science and technology



cluster source 1

Image: Mantis Deposition, Ltd


The cluster source is combined with a thin film sputter system to fabricate nanoparticle thin film composites in contineous vacuum:


Metals, semiconductors and insulators can be used for the nanoparticles and thin films.

cluster source 3