Cluster source literature:
Invention of the gas aggregation magnetron sputtering cluster source:
Filling of micronâsized contact holes with copper by energetic cluster impact
Cluster source overviews:
The physics of simple metal clusters: experimental aspects and simple models
Cluster beam deposition: a tool for nanoscale science and technology
Image: Mantis Deposition, Ltd
Gas-Phase Synthesis of Nanoparticles
My system: The “Zeester”, “Starfish”, “Stella di Mare”:
The cluster source is combined with a thin film sputter system to fabricate nanoparticle thin film composites in contineous vacuum:
Metals, semiconductors and insulators can be used for the nanoparticles and thin films.
